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Chalcogenide glass or phase-change-memory materials sputtering targets

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CRM produce big diameter(440mm) Chalcogenide glass or phase-change-memory materials sputtering targets


-Germanium antimony tellurium sputtering targets; Ge-Sb-Te sputtering targets;

Ge2Sb2Te5 GST sputtering targets

-Titanium antimony tellurium sputtering targets; Ti-Sb-Te sputtering targets;

Ti-Sb-Te

-Scandium antimony tellurium sputtering targets; Sc-Sb-Te sputtering targets;

Sc-Sb-Te

-Germanium selenium arsenic tellurium silicon sputtering targets; 

Ge-Se-As-Te-Si sputtering targets;GeSeAs(Te,Si)


Biggest diameter : 470mm diameter

Purity:99.99%min & 99.999%min

Ge2Sb2Te5_sputtering_target.jpg

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