Aluminum Tantalum (AlTa) Alloy

Aluminum Tantalum (AlTa) Alloy Sputtering Target

Purity--- Al-Ta13/87

Shape--- Discs, Plate, Step ( Dia ≤480mm,,  Thickness ≥ 1mm)

                        Rectangle, Sheet,  Step ( Length≤410mm,Width ≤300mm, Thickness ≥1mm)

                        Tube( Diameter< 300mm,  Thickness >2mm, )

Application --- B4C in general are used for wear-resistant films and semi-conducting films.

B4C are used as diffusion barriers in both silicon and III-V device technology in multilevel metallization schemes involving aluminum as a second level.

Aluminum Tantalum (AlTa) Alloy

Purity--- Al-Ta13/87

Shape--- Granules, Powders